Analysis of Gas Flow in a Secondary Electron Scintillation Detector for ESEM with a New System of Pressure Limiting Apertures
Keywords:
ESEM, SEs Scintillation Detector, CFD, CAE, SolidWorks, AnsysAbstract
Environmental scanning electron microscopes offer wide possibilities for the exploration of various types of specimens, especially non-conductive and wet specimens containing different material phases. In this article the results of gas-pumping simulations are analyzed for the novel design of pressure limiting apertures in a secondary electron scintillation detector with usage of SolidWorks and Ansys systems.
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