Analysis of Gas Flow in a Secondary Electron Scintillation Detector for ESEM with a New System of Pressure Limiting Apertures

Authors

  • J. Maxa Brno University of Technology, Czech Republic
  • V. Neděla Institute of Scientific Instruments of the ASCR, Brno, Czech Republic
  • J. Jirák Brno University of Technology, Czech Republic
  • P. Vyroubal Brno University of Technology, Czech Republic
  • K. Hladká Brno University of Technology, Czech Republic

Keywords:

ESEM, SEs Scintillation Detector, CFD, CAE, SolidWorks, Ansys

Abstract

Environmental scanning electron microscopes offer wide possibilities for the exploration of various types of specimens, especially non-conductive and wet specimens containing different material phases. In this article the results of gas-pumping simulations are analyzed for the novel design of pressure limiting apertures in a secondary electron scintillation detector with usage of SolidWorks and Ansys systems.

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Published

22-02-2022

How to Cite

Maxa, J., Neděla, V., Jirák, J., Vyroubal, P., & Hladká, K. (2022). Analysis of Gas Flow in a Secondary Electron Scintillation Detector for ESEM with a New System of Pressure Limiting Apertures. Advances in Military Technology, 7(2), 111–116. Retrieved from https://aimt.cz/index.php/aimt/article/view/1588

Issue

Section

Technical Information