The Impact of Critical Flow on the Primary Electron Beam Passage through Differentially Pumped Chamber

Authors

  • J. Maxa Faculty of Electrical Engineering and Communication, Brno University of Technology, Brno, Czech Republic
  • V. Neděla Academy of Sciences of the Czech Republic, Brno, Czech Republic

Keywords:

EREM, CAE, SolidWorks, Cosmos, FEI, Differentially Pumped Chamber

Abstract

Environmental scanning electron microscope creates new possibilities in the field of examination of various types of specimens and their phases. The article analyses and compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.

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Published

28-02-2022

How to Cite

Maxa, J., & Neděla, V. (2022). The Impact of Critical Flow on the Primary Electron Beam Passage through Differentially Pumped Chamber. Advances in Military Technology, 6(1), 39–46. Retrieved from https://aimt.cz/index.php/aimt/article/view/1614

Issue

Vol. 6 No. 1 (2011)

Section

Research Paper

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