The Impact of Critical Flow on the Primary Electron Beam Passage through Differentially Pumped Chamber
Keywords:
EREM, CAE, SolidWorks, Cosmos, FEI, Differentially Pumped ChamberAbstract
Environmental scanning electron microscope creates new possibilities in the field of examination of various types of specimens and their phases. The article analyses and compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.
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