Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber

Jiří Maxa; V. Bílek; P. Hlavatá; P. Vyroubal; Kristýna Lepltová

doi:10.3849/aimt.01120

Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber

Authors

Jiří Maxa Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, University of Technology, Brno, Czech Republic
V. Bílek Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, University of Technology, Brno, Czech Republic
P. Hlavatá Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, University of Technology, Brno, Czech Republic
P. Vyroubal Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, University of Technology, Brno, Czech Republic
Kristýna Lepltová Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, University of Technology, Brno, Czech Republic

DOI:

https://doi.org/10.3849/aimt.01120

Keywords:

ANSYS Fluent, differentially pumped chamber, EREM, Monte Carlo, SolidWorks

Abstract

The article deals with the analysis of gas flows in pumped canals in differential pumped chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares and verifies existing results of differentially pumped chamber flow simulation from ANSYS Fluent system, which uses the mechanics of continuum, with the ones published by D. Danilatos using the Monte Carlo method.

Author Biography

Jiří Maxa, Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, University of Technology, Brno, Czech Republic

Ústav elektrotechnologie, FEKT, VUT Brno, technická 10, 61600

References

NEDĚLA, V., KONVALINA, I., LENCOVÁ, B. and ZLÁMAL, J. Comparison of Calculated, Simulated and Measured Signal Amplification in Variable Pressure SEM. Nuclear Instruments & Methods in Physics Research Section A, 2011, vol. 645, no. 1, p. 79-83.

NEDĚLA, V., HŘIB, J. and VOOKOVÁ, B. Imaging of Early Conifer Embryogenic Tissues with the Environmental Scanning Electron Microscope. Biologia Plantarum, 2012, vol. 56, no. 3, p. 595-598.

TIHLAŘÍKOVÁ, E., NEDĚLA, V. and SHIOJIRI, M. In Situ Study of Live Specimens in an Environmental Scanning Electron Microscope. Microscopy and Microanalysis, 2013, vol. 19, no. 4, p. 914-918.

MAXA, J. and NEDĚLA, V. The Impact of Critical Flow on the Primary Electron Beam Passage through Differentially Pumped Chamber. Advances in Military Technology, 2011, vol. 6, no. 1, p. 39-46. ISSN 1802-2308.

MAXA, J., NEDĚLA, V., JIRÁK, J., VYROUBAL, P. and HLADKÁ, K. Analysis of Gas Flow in a Secondary Electron Scintillation Detector for ESEM with a New System of Pressure Limiting Apertures. Advances in Military Technology, 2012, vol. 7, no. 2, p. 39-44.

VERSTEEG, K. and MALALASEKERA, W. An Introduction to Computational Fluid Dynamics: The Finite Volume Method. Reading. Addison-Wesley, 1995, 257 p.

DANILATOS, G.D., Velocity and Ejector-jet Assisted Differential Pumping: Novel Design Stages for Environmental SEM. Micron, 2012, vol. 43, no. 5, p. 600-611.

VYROUBAL, P., MAXA, J., NEDĚLA, V., JIRÁK, J. and HLADKÁ, K. Apertures with Laval Nozzle and Circular Orifice in Secondary Electron Detector for Environmental Scanning Electron Microscope, Advances in Military Technology, 2013, vol. 8, no. 1, p. 59-69.

ANSYS Web Help [online]. ANSYS Inc. PDF Documentation for Release 15.0 [cit. 2016-05-08]. Available from: <http://148.204.81.206/Ansys/readme.html>

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Published

26-06-2016

Issue

Vol. 11 No. 2 (2016)

Section

Research Paper

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How to Cite

Maxa, J., Bílek, V., Hlavatá, P., Vyroubal, P., & Lepltová, K. (2016). Comparisons Using Methods of Continuum Mechanics and Monte Carlo at Differentially Pumped Chamber. Advances in Military Technology, 11(2), 143-150. https://doi.org/10.3849/aimt.01120