Analysis of the Impact of the Conic Aperture in the Differentially Pumped Chamber

Jiří Maxa; Pavla Hlavatá; Petr Vyroubal

doi:10.3849/aimt.01268

Authors

Jiří Maxa Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic
Pavla Hlavatá Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic
Petr Vyroubal Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic

DOI:

https://doi.org/10.3849/aimt.01268

Keywords:

ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope (ESEM), finite volume method, Taylor-Maccoll theory

Abstract

The paper focuses on the simulation of medium dynamics in the environmental scanning electron microscope. In particular, the paper examines the conical aperture location effect in the differentially pumped chamber and the width of the pumping channel in this chamber. The solution is based on the Taylor-Maccoll theory about the impact of the shock wave and was obtained by the use of continuum and finite volume methods in the ANSYS Fluent system.

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